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Relation between low-frequency noise and long-term reliability of single AlGaAs/GaAs power HBTs

机译:单个AlGaAs / GaAs功率HBT的低频噪声与长期可靠性之间的关系

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摘要

Self-aligned AlGaAs/GaAs single heterojunction bipolar transistors (HBTs) were fabricated using an advanced processing technology for microwave and millimeter-wave power applications. These devices were processed simultaneously, on different epilayers with similar layer structure design supplied from different vendors. They showed similar dc characteristics (current gain, /spl beta/=30) and their microwave performance was also identical (f/sub T/=60 GHz, f/sub max/=100 GHz). The HBTs showed different noise and reliability characteristics depending on their epilayer origin. HBT's from the high-reliability wafer showed MTTF of 10/sup 9/ h at junction temperature of 120/spl deg/C. They also presented very small 1/f noise with corner frequencies in the range of a few hundred Hz. Devices were subjected to bias and temperature stress for testing their noise and reliability characteristics. Stressed and unstressed devices showed generation-recombination noise with activation energies between 120-210 meV. Stress was found to increase the generation-recombination noise intensity but not its activation energy. These HBTs did not show any surface-related noise indicating that processing did not significantly influence noise characteristics. It was found that the base noise spectral density at low frequency can be correlated to the device long term reliability.
机译:自对准AlGaAs / GaAs单异质结双极晶体管(HBT)是使用先进的加工技术制造的,用于微波和毫米波功率应用。这些设备在不同供应商提供的具有相似层结构设计的不同外延层上同时进行处理。它们显示出相似的直流特性(电流增益,/ spl beta / = 30),并且它们的微波性能也相同(f / sub T / = 60 GHz,f / sub max / = 100 GHz)。 HBT表现出不同的噪声和可靠性特征,具体取决于其外延层起源。来自高可靠性晶圆的HBT在120 / spl deg / C的结温下显示的MTTF为10 / sup 9 / h。他们还给出了极小的1 / f噪声,其转角频率在几百Hz的范围内。器件承受偏压和温度应力以测试其噪声和可靠性特征。受压和未受压的器件显示出产生重组的噪声,其活化能在120-210 meV之间。发现应力增加了世代复合噪声强度,但没有增加其活化能。这些HBT并未显示任何与表面相关的噪音,表明加工过程不会显着影响噪音特性。已经发现,低频的基本噪声频谱密度可以与器件的长期可靠性相关。

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