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Heat Dissipation in High-Power GaN Electronics on Thermally Resistive Substrates

机译:耐热衬底上大功率GaN电子中的散热

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The heat dissipation in GaN devices grown on low thermal conductivity lithium gallate (LGO) substrates was investigated. The thermal conductivity of single-crystal LGO was measured utilizing the 3ω technique for temperatures ranging from 100 K-500 K. For the GaN layer, the thermal conductivity was estimated using a phonon transport model which included dislocation density and temperature dependence. These data were then used in a finite element program to determine the thermal behavior of a heterojunction field-effect transistor. Based on a maximum junction temperature of 500 K, it was found that devices with a power dissipation of 1 W/mm were possible if the primary heat dissipation path was through the low thermal conductivity substrate. However, in using a front side cooling scheme, results suggest that it may be possible to develop devices with power dissipation in the range of 10 W/mm.
机译:研究了在低导热率没食子酸锂(LGO)衬底上生长的GaN器件的散热。使用3ω技术在100 K-500 K的温度范围内测量了单晶LGO的导热系数。对于GaN层,使用包括位错密度和温度依赖性的声子传输模型估算了导热系数。然后,将这些数据用于有限元程序中,以确定异质结场效应晶体管的热行为。基于最大结温500 K,发现如果主要散热路径通过低热导率基板,则可以实现功耗为1 W / mm的器件。但是,在使用正面冷却方案时,结果表明,有可能开发功耗在10 W / mm范围内的设备。

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