3-D Analytical Modeling of Dual-Material Triple-Gate Silicon-on-Nothing MOSFET

摘要

A 3-D analytical model of a new structure, namely, dual-material triple-gate silicon-on-nothing MOSFET is proposed in this paper. 3-D Poisson's equation with proper boundary conditions was solved to obtain the surface potential variation of the structure considering the popular parabolic potential approximation, and the threshold voltage and electric field were calculated for the model. The proposed model's immunity to the various short-channel effects, such as threshold voltage roll-off, Drain-Induced Barrier Lowering (DIBL), and subthreshold swing, are also examined, and the impact of the various device parameters on the performance of the device is studied. The 3-D simulated results obtained using ATLAS, a device simulator from Silvaco, validate the analytical results obtained for this structure.