Improvement of Long-Term Durability and Bias Stress Stability in p-Type SnO Thin-Film Transistors Using a SU-8 Passivation Layer

摘要

We investigate the effects of ambient atmosphere on the electrical performance of p-type tin monoxide (SnO) thin-film transistors (TFTs), and present the effective method for the passivation of SnO TFTs using a SU-8 organic layer. The experimental data shows that the SnO TFTs without a passivation layer suffer from the electrical performance degradation under humid environments, which implies that the formation of the passivation layer is necessary in p-type SnO TFTs for the stable operation of the devices. The SU-8 organic layer was successfully incorporated as a passivation layer of SnO TFTs. The SnO TFTs with a SU-8 passivation layer exhibit very similar transfer characteristics with those without a passivation layer, and show much improved long-term durability and bias stress stability compared with the SnO TFTs without a passivation layer under air environments.