Large-Area Polymeric Microplasma Devices With Elongated Lifetime for Flexible Display and Photonic Applications

摘要

This letter describes the fabrication and performance of microplasma devices and arrays by a replica molding process in which the substrate is a flexible and ultraviolet (UV) transparent glass/polymer hybrid structure. In particular, ultrathin flexible glass sheets were embedded into the device so as to minimize outgassing of undesirable gas species and reinforce flexible substrates from the fatigue. Extended lifetime of the polymeric devices has been observed up to 200 h, with full recovery after refilling with gas. The major component of the devices has a high UV transmittance, and is transparent up to about 220 nm.