机译:垂直夹层门 - 全围式场效应晶体管,具有自对准的高k金属栅极和小的有效栅极长度变化
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China|Univ Sci & Technol China Sch Microelect Hefei 230026 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China;
Univ Sci & Technol China Sch Microelect Hefei 230026 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Univ Sci & Technol China Sch Microelect Hefei 230026 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China|Univ Sci & Technol China Sch Microelect Hefei 230026 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Key Lab Microelect Devices & Integrated Technol Inst Microelect Beijing 100029 Peoples R China;
Logic gates; Silicon; Field effect transistors; Gallium arsenide; Etching; Silicon germanium; Metals; Vertical nanowire; gate-all-around (GAA); SiGe channel; Si cap; atomic layer etching (ALE);
机译:局部高k绝缘子对绝缘栅金属氧化物半导体场效应晶体管的可驱动性和待机功率的影响
机译:具有自对准NiGe / Ge结和可大规模缩放的高k栅极叠层的肖特基源/漏锗基金属氧化物半导体场效应晶体管
机译:具有自对准高k金属栅极的垂直夹层Gaa Fet,由准原子层蚀刻工艺制成
机译:具有金属半导体 - 金属异构型掺杂剂偏析的门 - 全绕量子线场效应晶体管
机译:自对准后栅极磷化铟和砷化铟镓砷场效应晶体管(FET,光电)的研究。
机译:全方位栅InAs纳米线金属氧化物半导体场效应晶体管中的高度栅可调Rashba自旋轨道相互作用
机译:用于垂直栅极 - 全邻金属氧化物半导体场效应晶体管的垂直栅极 - 全氧化物半导体场效应晶体管制备期间的方差减少