Design and analysis of a low crosstalk error nested structure two-dimensional micro-displacement stage

Tao Jin; Siwei Luo; Yanfen Le; Junjie Wu; Lihua Lei; Bo Zhang

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Design and analysis of a low crosstalk error nested structure two-dimensional micro-displacement stage

机译：低串扰误差嵌套结构二维微位移阶段的设计与分析

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In order to solve the low coupling displacement and high crosstalk error of multi-dimensional micro-displacement stage, a two-dimensional micro-displacement stage based on flexure hinges and piezoe...

机译：为了解决多维微位移阶段的低耦合位移和高串扰误差，基于挠性铰链和压电的二维微位移级......

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来源
《Advances in Mechanical Engineering》 |2021年第4期|共7页
作者
Tao Jin; Siwei Luo; Yanfen Le; Junjie Wu; Lihua Lei; Bo Zhang;
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中图分类机械、仪表工业;
关键词
Flexible hingepiezoelectric ceramicsnested structuretwo-dimensional micro-displacement stagelow crosstalk error;

机译：灵活的HingePiezo电陶瓷有限的结构结构术术尺寸微位移Stagelow串扰错误;

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Design and analysis of a low crosstalk error nested structure two-dimensional micro-displacement stage

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