Dynamics Study of Compliant Mechanism with Damping

摘要

Flexure mechanisms are used in many fields such as precision positioning, micro/nanoscale fabrication, force/torque sensors, optical fibers, bio-engineering, nano-imprint technology. Recently, there have been studies conducted about its mechanical characteristics so far and applications. However, most of these studies have just only focused on the static analysis or the inadequately dynamic analysis without considering the damping characteristics of flexure joints. This paper presents the fully dynamic analysis of a flexure mechanism with a combination of damping factors in particular. The mechanism provides small linear motion. The dynamic characteristics including the response of output link and the natural frequency of the flexure mechanism are determined based on a dynamic analysis on the pseudo-rigid- body diagram and based on the finite element model.