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Manufacturing, Encapsulation and Reliability of Micro- and Nano-Sensors

机译:微型和纳米传感器的制造,封装和可靠性

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One of the most common applications of MEMS/NEMS is using them as microsensors and micro-actuators. They have become varied in their applications and can be found almost everywhere in everyday life. The popularity of these microsensors and micro-actuators is mostly due to the great advantages that they possess. In addition to their small size, MEMS sensors and micro-actuators consume very little power and are capable of delivering accurate measurements.
机译:MEMS / NEMS最常见的应用是使用它们作为微传感器和微致动器。它们在其应用中变化,并且几乎可以在日常生活中找到。这些微传感器和微型执行器的普及主要是由于它们具有的优点。除了尺寸的小尺寸外,MEMS传感器和微型执行器还消耗了很少的功率,并且能够提供精确的测量。

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