In recent years, with the development of microelectronics technology of mechanical system, micro-/nano-sensor based on micro electro mechanical system (MEMS) technology has been widely used in the field of national defense and civil. Micro-/nano-sensor, especially in the micro air vehicles (MAVs) navigation timing and positioning system has become one of the important direction of development at home and abroad. In this paper, the relationship between MNPTS and MAVs is introduced, the research situation and development trend of micro-/nano-sensor and MNPTS are summarized.
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