A Large Range Linear Displacement Calibration System Based on Coordinate Measurement and Laser Interference

摘要

The linear displacement sensor is widely used in industrial measurement. The linear displacement sensor with measuring range less than 200mm is usually measured on a universal length measuring instrument. There is no good method to calibrate linear displacement sensor with measuring range larger than 200mm. The calibration system of linear displacement based on coordinate measurement and dual frequency laser interference is developed. The guide rail and measuring positioning system of coordinate measuring machine is used. The sampling signal of dual frequency laser interferometer is connected with the pulse signal triggered by coordinate measuring machine. The accurate position information of the linear displacement sensor is obtained and processed by industrial computer. According to JJF 1305-2011 Calibration Specification for Linear Displacement Sensor, a large range of linear displacement sensors is calibrated. The accuracy and reliability of linear displacement calibration system based on coordinate measurement and laser interference is verified.