Electrons dynamics control by shaping femtosecond laser pulses in microanofabrication: modeling, method, measurement and application

摘要

The prospects for improving femtosecond-laser materials processing by controlling the electron dynamics in target materials are reviewed. Lan Jiang of Beijing Institute of Technology and co-workers from China and the US describe how a scheme called electron dynamic control can be implemented by temporally or spatially shaping femtosecond laser pulses. Electron dynamic control permits laser fabrication of microscale and nanoscale structures with enhanced precision, throughput and repeatability. The researchers describe the theory behind electron dynamic control and present various simulations and experimental demonstrations of its capabilities. The panoramic dynamics of femtosecond laser ablation was revealed by a multiscale measurement system. Triumphs include the drilling of high-quality, high aspect ratio microholes using pulses with a Bessel profile, which are employed to fabricate some key structures in one of the 16 Chinese National S&T Major Projects.