Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses

摘要

With ultrashort pulse durations and ultrahigh power densities, femtosecond laser presents unique advantages of high precision and high quality fabrication of microchannels in transparent materials. In our study, by shaping femtosecond laser pulse energy distribution in temporal or spatial domains, localized transient electrons dynamics and the subsequent processes, such as phase changes, can be controlled, leading to the dramatic increases in the capability of femtosecond laser microchannels fabrication. The temporally shaped femtosecond laser pulse trains can significantly enhance the material removal rate in both water-assisted femtosecond laser drilling and femtosecond laser irradiation followed by chemical etching. Besides, high-aspect-ratio and small-diameter microchannels are drilled by spatially shaped femtosecond laser pulses.