In this paper, we present a micro fluxgate sensor with solenoid coils. Micro-solenoid coils were used in this fluxgate sensor as excitation and sensing elements. Two identical excitation coils in inverse series were wound around the opposite sides of the rectangular-ring-shaped magnetic core, respectively. The sensing coil was placed vertically to the excitation coils and between them. Adopting gluing and chemical wet etching, iron-based nanocrystalline alloy was used as magnetic core material. This fluxgate sensor was designed to operate based on second harmonic operation principle. 100 kHz excitation currents with different effective values were selected to characterize the fabricated fluxgate sensor. From these experiments, we obtained some results from which we found out that the greatest sensitivity of 583.1 V/T was achieved with the effective excitation current of 150 mA. In the range from -500 μT to +500 μT, the fabricated fluxgate sensor can keep a good linearity. The noise power density was 13.57 nT/Hz0.5 at 1Hz and the noise RMS level was 23 nT in the frequency range of 10 mHz-25 Hz.
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机译：在本文中，我们提出了一种带有电磁线圈的微型磁通门传感器。微电磁线圈在该磁通门传感器中用作激励和传感元件。在矩形环状磁芯的相反两侧分别缠绕两个相反的相同的励磁线圈。感应线圈垂直于励磁线圈并在它们之间放置。铁基纳米晶合金通过胶粘和化学湿法刻蚀作为磁芯材料。该磁通门传感器设计为基于二次谐波工作原理进行工作。选择具有不同有效值的100 kHz激励电流来表征所制造的磁通门传感器。从这些实验中，我们获得了一些结果，从中我们发现，在150 mA的有效激励电流下，可以实现583.1 V / T的最大灵敏度。在-500μT至+500μT的范围内，制造的磁通门传感器可保持良好的线性度。在10 mHz-25 Hz的频率范围内，噪声功率密度在1Hz时为13.57 nT / Hz0.5，噪声RMS电平为23 nT。
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