MEMS technology in the fabrication of fluxgate sensor with micro-solenoid cores

摘要

In this paper, we presented a MEMS-based method of manufacturing micro fluxgate sensors. Micro-solenoid coils acting as excitation and sensing elements of the sensors were fabricated by MEMS technology and thick photoresist-based UV-lithography. Different processes were used to fabricate the magnetic cores made of different soft magnetic materials, respectively. Permalloy core was formed by electroplating, whereas gluing and chemical wet etching were adopted in the fabrication of the nanocrystalline alloy core. The two micro fluxgate sensors were characterized by a magnetic field measuring system. The experimental results showed that the micro fluxgate sensors possess high sensitivity, wide linear measuring range and low power consumption.