Fabrication and Study of Micro Monolithic Tungsten Ball Tips for Micro/Nano-CMM Probes ?

摘要

Micro ball tips with high precision, small diameter, and high stiffness stems are required to measure microstructures with high aspect ratio. Existing ball tips cannot meet such demands because of their weak qualities. This study used an arc-discharge melting method to fabricate a micro monolithic tungsten ball tip on a tungsten stylus. The principles of arc discharge and surface tension phenomenon were introduced. The experimental setup was designed and established. Appropriate process parameters, such as impulse voltage, electro discharge time, and discharge gap were determined. Experimental results showed that a ball tip of approximately 60 μm in diameter with less than 0.6 μm roundness error and 0.6 μm center offset could be realized on a 100 μm-diameter tungsten wire. The fabricated micro ball tip was installed on a homemade probe, touched by high-precision gauge blocks in different directions. A repeatability of 41 nm ( K = 2) was obtained. Several interesting phenomena in the ball-forming process were also discussed. The proposed method could be used to fabricate a monolithic probe ball tip, which is necessary for measuring microstructures.