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Hybrid processing of Ti-6Al-4V using plasma immersion ion implantation combined with plasma nitriding

机译:等离子体浸没离子注入与等离子体氮化相结合的Ti-6Al-4V混合工艺

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Based on the fact that the Ti-6Al-4V alloy has good mechanical properties, excellent resistance to corrosion and also excellent biocompatibility, however with low wear resistance, this work aims to test plasma processes or combination of plasma and ion implantation processes to improve these characteristics. Two types of processing were used: two steps PIII (Plasma Immersion Ion Implantation) combined with PN (Plasma Nitriding) and single step PIII treatment. According to Auger Electron Spectroscopy (AES) results, the best solution was obtained by PIII for 150 minutes resulting in ~ 65 nm of nitrogen implanted layer, while the sample treated with PIII (75 minutes) and PN (75 minutes) reached ~ 35 nm implanted layer. The improvement of surface properties could also be confirmed by the nanoindentation technique, with values of hardness increasing for both processes. AFM (Atomic Force Microscopy) characterization showed that the single step PIII process presented greater efficiency than the duplex process (PIII + PN), probably due to the sputtering occurring during the second step (PN) removing partially the implanted layer of first step (PIII).
机译:基于Ti-6Al-4V合金具有良好的机械性能,优异的耐腐蚀性以及出色的生物相容性的事实,但是其耐磨性低,因此该项目旨在测试等离子体工艺或等离子体与离子注入工艺的组合以改善这些性能。特征。使用两种类型的处理:两步PIII(等离子浸入离子注入)与PN(等离子氮化)相结合,以及单步PIII处理。根据俄歇电子能谱(AES)结果,PIII可以在150分钟内获得最佳溶液,从而产生〜65 nm的氮注入层,而用PIII(75分钟)和PN(75分钟)处理的样品达到〜35 nm植入层。表面性质的改善也可以通过纳米压痕技术来证实,这两种方法的硬度值均增加。 AFM(原子力显微镜)表征表明,单步PIII工艺比双工工艺(PIII + PN)表现出更高的效率,这可能是由于在第二步(PN)期间发生了溅射,部分去除了第一步(PIII)的注入层)。

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