PARAMETRIZATION OF ELECTRON ENERGY DISTRIBUTION FUNCTION IN GLOWDISCHARGE PLASMA UNDER RF ELECTROMAGNETIC FIELDS

A. A. AZOOZ

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PARAMETRIZATION OF ELECTRON ENERGY DISTRIBUTION FUNCTION IN GLOWDISCHARGE PLASMA UNDER RF ELECTROMAGNETIC FIELDS

机译：电磁场下辉光放电等离子体中电子能量分布函数的参数化

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Asetoftwentyfourplasmaglowdischargeexperimentsusingradio-frequencyelectromagneticfieldswerecarriedout.Thedischargepressurewas27Pa.Driedairwasusedasthedischargegas.Axialradio-frequencyfieldsbetween0.6-1.2MHzwereapplied.FourdifferentvaluesoftheRFfieldintensitywereused.Foreachcase,theplasmaLangmuirprobecharacteristicsweremeasured.Acomputationalmethodwasusedtoextracttheelectronenergydistributionfunctionineachcase.Valuesoftheplasmadensityandplasmatemperaturewereobtaineddirectlyfromthefits.Theycomparewellwithvaluesobtainedusingtheconventionallogarithmicmethod.TheMaxwellianbehaviourofthedistributionfunctionwasestablishedtoholdinmanybutnotinallcases.

机译：Asetoftwentyfourplasmaglowdischargeexperimentsusingradio-frequencyelectromagneticfieldswerecarriedout.Thedischargepressurewas27Pa.Driedairwasusedasthedischargegas.Axialradio-frequencyfieldsbetween0.6-1.2MHzwereapplied.FourdifferentvaluesoftheRFfieldintensitywereused.Foreachcase，theplasmaLangmuirprobecharacteristicsweremeasured.Acomputationalmethodwasusedtoextracttheelectronenergydistributionfunctionineachcase.Valuesoftheplasmadensityandplasmatemperaturewereobtaineddirectlyfromthefits.Theycomparewellwithvaluesobtainedusingtheconventionallogarithmicmethod.TheMaxwellianbehaviourofthedistributionfunctionwasestablishedtoholdinmanybutnotinallcases。

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《Fizika: A journal of experimental and theoretical physics, A. atomic and molecular physics condensed matter physics plasma physics》 |2004年第4期|共页
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A. A. AZOOZ;
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中图分类分子物理学、原子物理学;
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PARAMETRIZATION OF ELECTRON ENERGY DISTRIBUTION FUNCTION IN GLOWDISCHARGE PLASMA UNDER RF ELECTROMAGNETIC FIELDS

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