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Processes and devices for generating plasmas energized by microwave energy in the field of electron cyclotron resonance (ECR) to perform surface treatments or coatings of filamentous components.
Processes and devices for generating plasmas energized by microwave energy in the field of electron cyclotron resonance (ECR) to perform surface treatments or coatings of filamentous components.
According to the process, the filiform component is continuously linearly moved through magnetic dipoles arranged opposite each other and around a tube constituting a treatment chamber, and the microwave energy is introduced between at least two magnetic dipoles.
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