首页> 外国专利> Processes and devices for generating plasmas energized by microwave energy in the field of electron cyclotron resonance (ECR) to perform surface treatments or coatings of filamentous components.

Processes and devices for generating plasmas energized by microwave energy in the field of electron cyclotron resonance (ECR) to perform surface treatments or coatings of filamentous components.

机译:在电子回旋共振(ECR)领域中产生由微波能量激发的等离子体的过程和装置,以进行表面处理或涂覆丝状组件。

摘要

According to the process, the filiform component is continuously linearly moved through magnetic dipoles arranged opposite each other and around a tube constituting a treatment chamber, and the microwave energy is introduced between at least two magnetic dipoles.
机译:根据该方法,丝状成分连续线性移动通过彼此相对并围绕构成处理室的管的磁偶极子,并且微波能量被引入至少两个磁偶极子之间。

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