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Process and device for generating a plasma energized by microwave energy in the field of electron cyclotron resonance (ECR) for performing surface treatment or coating of filamentous components
Process and device for generating a plasma energized by microwave energy in the field of electron cyclotron resonance (ECR) for performing surface treatment or coating of filamentous components
According to the present process, the thread-like components pass continuously and linearly through magnetic dipoles disposed around the tubes that constitute the processing chamber, with microwave energy between at least two magnetic dipoles. be introduced.
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