PROCESS AND DEVICE FOR GENERATING PLASMA TO WHICH ENERGY IS IMPARTED BY MICROWAVE ENERGY IN FIELD OF ELECTRON CYCLONE RESONANCE (ECR) FOR EXECUTING SURFACE TREATMENT OR COATING OF FILAMENTOUS COMPONENT

摘要

To provide a process for generating linear plasma confined in a periphery of an optional kind of filamentous component, in a plasma generation chamber having the minimum volume.SOLUTION: In a process, each filamentous component F is faced mutually, and moved continuously and linearly through magnetic dipoles 1, 2 arranged on the periphery of a tube constituting a treatment chamber, and microwave energy is introduced between at least two magnetic dipoles 1, 2.SELECTED DRAWING: Figure 2