Time-Resolved Optical Emission and Electron Energy Distribution FunctionMeasurements in rf Plasmas

摘要

Comparisons between experiment measured time-dependent electron energydistribution functions and optical emission intensities are reported for low-frequency (100 and 400 kHz) radio-frequency driven charges in argon. The electron energy distribution functions were measured with a time-resolved Langmuir probe system. Time-resolved optical emissions of argon resonance lines at 687.1 and 750.4 nm were determined by photon-counting methods. Known ground-state and metastable-state excitation cross sections were used along with the measured electron energy distribution functions to calculate the time dependence of the optical emission intensity. It was found that a calculation using only the ground-state cross sections gave the best agreement with the time dependence of the measured optical emission. Time-dependent electron density, electron temperature, and plasma potential measurements are also reported.