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Precision Surface Grinding of Silicon Carbide

机译:碳化硅的精密表面研磨

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摘要

Silicon carbide (SiC) is well known for its excellent material properties, high durability, high wear resistance, light weight and extreme hardness. Among the engineering applications of this material, it is an excellent candidate for optic mirrors used in an Airbone Laser (ABL) device. However, the low fracture toughness and extreme brittleness characteristics of SiC are predominant factors for its poor machinability. This paper presents surface grinding of SiC using diamond cup wheels to assess the performance of diamond grits with respect to the roughness produced on the machined surfaces and also the morphology of the ground work-piece. Resin bonded diamond cup wheels of grit sizes 46 μm, 76 μm and 107 μm; depth of cut of 10 μm, 20 μm and 30 μm; and feed rate of 2 mm/min, 12 mm/min and 22 mm/min were used during this machining investigation. It has been observed that the 76 grit performs better in terms of low surface roughness value and morphology.
机译:碳化硅(SiC)以其优异的材料性能,高耐久性,高耐磨性,轻质和极高的硬度而闻名。在该材料的工程应用中,它非常适合用于Airbone Laser(ABL)设备中的光学镜。然而,SiC的低断裂韧性和极脆性是其可加工性差的主要因素。本文介绍了使用金刚石杯形砂轮对SiC进行的表面研磨,以评估金刚石磨粒的性能,以及在加工表面上产生的粗糙度以及被磨工件的形态。粒度为46μm,76μm和107μm的树脂粘结金刚石杯轮;切割深度为10μm,20μm和30μm;在该机加工研究中使用了2 mm / min,12 mm / min和22 mm / min的进给速度。已经观察到,在低表面粗糙度值和形态方面,这76种砂砾表现更好。

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