Analytical and Simulation Evaluation for Diaphragm’s Deflection and its Applications to Touch Mode MEMS Capacitive Pressure Sensors

Y. Hezarjaribi; M.N. Hamidon; R.M. Sidek; S.H. Keshmiri; R.S.A. Raja Abdullah; A.R. Bahadorimehr

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Analytical and Simulation Evaluation for Diaphragm’s Deflection and its Applications to Touch Mode MEMS Capacitive Pressure Sensors

机译：膜片挠度的分析和仿真评估及其在触摸模式MEMS电容式压力传感器中的应用

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《Australian Journal of Basic and Applied Sciences》 |2009年第2016期|共4页
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Y. Hezarjaribi; M.N. Hamidon; R.M. Sidek; S.H. Keshmiri; R.S.A. Raja Abdullah; A.R. Bahadorimehr;
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1. Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC Circular Diaphragm: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison* [J] . Jindal Sumit Kumar, Varma M. Aditya, Thukral Deepali Journal of circuits, systems and computers . 2019,第12期

机译：利用柔性SiC圆形膜片的MEMS接触式电容式压力传感器的研究：稳健的设计，理论建模，数值模拟和性能比较*
2. Evaluation for Diaphragm's Deflection for Touch Mode MEMS Pressure Sensors [J] . Yadollah Hezarjaribi, Mohd Hamidon, Roslina Sidek, The international arab journal of information technology . 2011,第2期

机译：评估触摸式MEMS压力传感器的膜片挠度
3. A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor [J] . Jindal Sumit Kumar, Mahajan Ankush, Raghuwanshi Sanjeev Kumar Microsystem technologies . 2016,第5期

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4. Analytical Comparison of Circular Diaphragm Based Simple, Single and Double Touch Mode –MEMS Capacitive Pressure Sensor [C] . Sumit Kumar Jindal, Sanjeev Kumar Raghuwanshi International Conference on Communication Systems . 2016

机译：基于圆形膜片的简单，单触控模式的分析比较 - 电容式压力传感器
5. Development of a Capacitive MEMS Force Sensor for Touchscreen Applications [D] . Banss, Ali Omar Nasser. 2018

机译：开发用于触摸屏应用的电容MEMS力传感器
6. Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications [O] . Néstor N. Peña-García, Luz A. Aguilera-Cortés, Max A. González-Palacios, 2018

机译：带有弹簧支撑膜片的MEMS双背板电容麦克风的设计与建模用于移动设备应用
7. Analysis of small deflection touch mode behavior in capacitive pressure sensors [O] . Fragiacomo Giulio, Ansbæk Thor, Pedersen Thomas, 2010

机译：电容式压力传感器中小偏转触摸模式行为分析
8. New Analytical Solution for Diaphragm Deflection and its Application to a Surface-211 Micromachined Pressure Sensor [R] . Bitsie, F., Eaton, W. P., Plummer, D. W., 1999

机译：膜片挠度的新解析解及其在表面211微加工压力传感器中的应用

Analytical and Simulation Evaluation for Diaphragm’s Deflection and its Applications to Touch Mode MEMS Capacitive Pressure Sensors

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