Temperature of Particulates in Low-Pressure rf-Plasmas in Ar, Ar/H2 and Ar/N2 Mixtures

摘要

The temperature of micro-particles, confined in the sheath of a capacitively coupled low-pressure rf-discharge in front of an Adaptive Electrode, has been measured for different plasma conditions and in different gas mixtures by using temperature-dependent optical features of the particles. In the range from 10 to 50 Pa, the temperature increase with rising discharge power is found to be more pronounced at low pressures than at higher pressures. Addition of molecular gases to the argon-plasma may either result in a temperature decrease (as in the case of nitrogen) or in additional heating of the particles (when hydrogen is added). The measured particle temperature is discussed with respect to appearing plasma-particle interactions which contribute to the particle's energy balance (© 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)