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Reducing water usage in semiconductor manufacturing

机译:减少半导体制造中的用水

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摘要

While semiconductor manufacturing is a minor user of the world's total water supply, its impact on specific regions can be significant. For example, Intel Rio Rancho is the largest water user in the Bernalillo water district of New Mexico, even though its annual water draw is only about the same as 16 golf courses. Semiconductor manufacturers in many locations are being denied requests for the additional water needed to support plans for expanding production or even to build a new fab at a site where it will become a dominant water user. The message to semiconductor manufacturers is to use less water per unit product output, notwithstanding the well-understood fact that semiconductor manufacturing already returns much higher product value per unit of water used than virtually any other human activity. Approval for plant expansion often comes with the stipulation that water demand from the regional supply remains the same as prior to expansion.
机译:尽管半导体制造仅占世界总供水量的很小一部分,但对特定地区的影响却是巨大的。例如,英特尔里奥牧场(Rio Rancho)是新墨西哥州贝纳里洛(Bernalillo)水区的最大用水户,尽管其年度用水量仅与16个高尔夫球场相同。许多地方的半导体制造商都被要求提供额外的水,以支持扩大生产计划,甚至在将成为主要用水户的地点建造新的晶圆厂。向半导体制造商传达的信息是,尽管人们已经理解的事实是,半导体制造业已经比几乎任何其他人类活动所获得的单位水消耗的产品价值高得多的事实,但是却要使单位产品产出的水使用更少。工厂扩建的批准通常带有以下规定:来自区域供应的水需求与扩建之前的需求保持不变。

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  • 来源
    《CleanRooms》 |2002年第6期|p.24-26|共3页
  • 作者

    Robert Donovan;

  • 作者单位

    L&M Technologies Inc., Albuquerque, NM;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工业技术;
  • 关键词

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