Influence of particle size on densification and abnormal expansion of LTCC multilayer substrate

摘要

Two series of LTCC (low temperature cofired ceramic) multilayer substrates were fabricated using glass powders with different particle sizes. The series with finer particle size always showed better densification properties. Abnormal expansion was found in the experimental samples as a result of the emergence and growth of a second crystalline phase, Al₃Si₂O₁₃.