Panasonic Factory Solutions Sets View On Mems, Reinforces Dry Etching Equipment Line

摘要

Panasonic Factory Solutions Co., Ltd. set up in April the Micro Processing Business Group within the Microelectronics Assembly Business Unit, kicking off its entry into the dry etching system business in earnest. The new business unit is headed by Hideo Michihiro as the Business Group Manager. Dry etching refers to the process of forming micropatterns on thin films or substrate materials by making use of the physical and chemical reaction of plasma particles. Traditionally, chemicals have been used for the pattern formation, but it is difficult to control the changes in shapes and dimensions. As it uses no chemicals, dry etching starts to draw attention in the processing of microelectromechanical systems (MEMS) and in the microfabrica-tion of semiconductors. "MEMS is drawing attention from various industries. Acceleration sensors, printer heads, Digital Micromirror Devices (DMDs), silicon microphones and others have already been released in the market. However, (the MEMS field) is still developing," says Michihiro.