首页> 外文期刊>Applied Surface Science >Structural and compositional analysis of InBi_xAs_ySb_(1-x-y) films grown on GaAs(0 0 1) substrates by liquid phase epitaxy
【24h】

Structural and compositional analysis of InBi_xAs_ySb_(1-x-y) films grown on GaAs(0 0 1) substrates by liquid phase epitaxy

机译:液相外延生长在GaAs(0 0 1)衬底上的InBi_xAs_ySb_(1-x-y)薄膜的结构和组成分析

获取原文
获取原文并翻译 | 示例
       

摘要

The growth of epitaxial InBi_xAs_ySb_(1-x-y) layers on highly lattice mis-matched semi-insulating GaAs substrates has been successfully achieved via the traditional liquid phase epitaxy. Orientation and single crystalline nature of the film have been confirmed by X-ray diffraction. Scanning electron micrograph shows abrupt interface at micrometer resolution. Surface composition of Bi(x) and As(y) in the InBi_xAs_ySb_(1-x-y) film was measured using energy dispersive X-ray analysis and found to be 2.5 and 10.5 at.%, respectively, and was further confirmed with X-ray photoelectron spectroscopy. Variation of the composition with depth of the film was studied by removing the layers with low current (20 μA) Ar~+ etching. It was observed that with successive Ar~+ etching, In/Sb ratio remained the same, while the As/Sb and Bi/Sb ratios changed slightly with etching time. However after about 5 min etching the As/Sb and Bi/Sb ratios reached constant values. The room temperature band gap of InBi_(0.025) As_(0.105)Sb_(0.870) was found to be in the range of 0.113-0.120 eV. The measured values of mobility and carrier density at room temperature are 3.1 x 10~4 cm~2 V~(-1) s~(-1) and 8.07 x 10~(16) cm~(-3), respectively.
机译:通过传统的液相外延技术已经成功地实现了在高度晶格失配的半绝缘GaAs衬底上外延InBi_xAs_ySb_(1-x-y)层的生长。通过X射线衍射已经证实了膜的取向和单晶性质。扫描电子显微照片在微米分辨率下显示出突然的界面。使用能量色散X射线分析法测量InBi_xAs_ySb_(1-xy)膜中Bi(x)和As(y)的表面组成,分别为2.5和10.5 at。%,并进一步用X-确认射线光电子能谱。通过用低电流(20μA)Ar〜+蚀刻去除层,研究了成分随膜深的变化。观察到,通过连续的Ar〜+蚀刻,In / Sb比率保持不变,而As / Sb和Bi / Sb比率随蚀刻时间而略有变化。然而,蚀刻约5分钟后,As / Sb和Bi / Sb之比达到恒定值。发现InBi_(0.025)As_(0.105)Sb_(0.870)的室温带隙在0.113-0.120eV的范围内。室温下迁移率和载流子密度的测量值分别为3.1 x 10〜4 cm〜2 V〜(-1)s〜(-1)和8.07 x 10〜(16)cm〜(-3)。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号