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首页> 外文期刊>Applied Surface Science >The protective properties of ultra-thin diamond like carbon films for high density magnetic storage devices
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The protective properties of ultra-thin diamond like carbon films for high density magnetic storage devices

机译:超薄类金刚石薄膜对高密度磁存储设备的保护性能

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With the increase of magnetic storage density, the thickness of the protective diamond like carbon (DLC) film on the surfaces of head and disk is required as thin as possible. In this paper, the structure, mechanical properties and corrosion and oxidation resistance of ultra-thin DLC films are investigated. The ultra-thin DLC films were deposited by using filtered cathodic vacuum arc (FCVA) technique. The exact thickness of the ultra-thin DLC film was determined by high resolution transmission electron microscope (HRTEM). Raman analysis indicates that the ultra-thin DLC film presents ta-C structure with high sp3 fraction. In the wear test, a diamond tip was used to simulate a single-asperity contact with the film surface and the wear marks were produced on the film surface. The wear depths decrease with film thickness increasing. If the film thickness was 1.4 nm or above, the wear depth was much lower than that of Si substrate. This indicates that the ultra-thin DLC film with thickness of 1.4 nm shows excellent wear resistance. Corrosion tests in water and oxidation tests in air were carried out to investigate the diffusion barrier effect of the ultra-thin DLC films. The results show that the DLC film with thickness of 1.4 nm provides adequate coverage on the substrate and has good corrosion and oxidation resistance.
机译:随着磁存储密度的增加,磁头和磁盘表面上的类金刚石保护碳(DLC)膜的厚度要求尽可能薄。本文研究了超薄DLC薄膜的结构,力学性能以及耐腐蚀和抗氧化性能。通过使用过滤阴极真空电弧(FCVA)技术沉积超薄DLC膜。超薄DLC膜的确切厚度通过高分辨率透射电子显微镜(HRTEM)确定。拉曼分析表明,超薄DLC膜具有高sp3分数的ta-C结构。在磨损测试中,使用金刚石尖端模拟与膜表面的单粗糙接触,并在膜表面上产生磨损痕迹。磨损深度随膜厚的增加而减小。如果膜厚度为1.4nm以上,则磨损深度比Si基板的磨损深度低得多。这表明厚度为1.4nm的超薄DLC膜显示出优异的耐磨性。为了研究超薄DLC膜的扩散阻挡作用,进行了水腐蚀试验和空气氧化试验。结果表明,厚度为1.4nm的DLC膜在基材上提供了足够的覆盖率,并具有良好的耐腐蚀和抗氧化性。

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