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Growth mechanism and stress relief patterns of Ni films deposited on silicone oil surfaces

机译:硅油表面沉积镍膜的生长机理及应力释放规律

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摘要

The growth mechanism and stress relief patterns of nickel (Ni) films, deposited on silicone oil surfaces by a thermal evaporation method, have been studied systematically. Our experiment shows that the growth mechanism of the Ni films approximately obeys a two-stage growth model. Characteristic cracks with sinusoidal appearance resulted from the internal stress can be frequently observed in the continuous Ni films after the samples are removed from the vacuum chamber. Several crack modes including the regularly sinusoidal cracks, zigzag cracks, attenuation cracks and self-similar cracks are described and analyzed by using the general theory of buckling of plates in detail. The internal stress and propagating velocity of the sinusoidal cracks are also discussed in this paper.
机译:对通过热蒸发法沉积在硅油表面的镍(Ni)膜的生长机理和应力释放规律进行了系统的研究。我们的实验表明,Ni膜的生长机理大致遵循两阶段生长模型。从真空室中取出样品后,在连续的Ni膜中经常观察到由内应力引起的具有正弦形特征裂纹。利用板屈曲的一般理论详细描述和分析了几种裂纹模式,包括规则的正弦形裂纹,之字形裂纹,衰减裂纹和自相似裂纹。本文还讨论了正弦裂纹的内部应力和传播速度。

著录项

  • 来源
    《Applied Surface Science》 |2009年第20期|8352-8358|共7页
  • 作者单位

    Department of Applied Physics, Zhejiang University of Technology, Hangzhou 310014, PR China Graduate School of Information Science and Technology, Hokkaido University, Sapporo 060-0814, Japan;

    Department of Physics, Zhejiang University, Hangzhou 310027, PR China;

    Department of Applied Physics, Zhejiang University of Technology, Hangzhou 310014, PR China;

    Department of Physics, Zhejiang University, Hangzhou 310027, PR China;

    Department of Applied Physics, Zhejiang University of Technology, Hangzhou 310014, PR China;

    Department of Physics, Zhejiang University, Hangzhou 310027, PR China;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    thin film growth; stress pattern; crack; liquid substrate;

    机译:薄膜生长;应力模式;裂纹;液体底物;
  • 入库时间 2022-08-18 03:07:48

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