Porous-pyramids structured silicon surface with low reflectance over a broad band by electrochemical etching

摘要

Porous-pyramids structured silicon surface was prepared and its influence on the reflectance of the silicon surface was studied. The porous-pyramids structured surface was prepared by electrochemical etching in HF/C_2H_5OH solution after texturization in NaOH/IPA solution. The average reflectance of the surface in the range of 400-800 nm was as low as 1.9%. The optical photographs and SEM images of the surfaces prepared under optimized condition were investigated. The porous-pyramids structured surface has a gradient-index multilayer structure (i.e., the refraction index of the structure increase from the top to the bottom). A formula that describes the relationship between the reflectance and the index of refraction was used to explain the excellent broadband antireflection of the multilayer silicon surface. The technique of this paper may be valuable in the texturization process for high-efficiency silicon solar cells.