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The influence of thin film grain size on the size of nanoparticles generated during UV femtosecond laser ablation of thin gold films

机译:薄膜粒度对金膜UV飞秒激光烧蚀过程中产生的纳米颗粒尺寸的影响

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The upsurge in the number of thin film products has encouraged studies into every aspect of their fabrication and application. An additional source of industrial interest is the laser ablation of thin films to generate nanoparticles. This technique offers advantages over other fabrication methods, as no chemical pre-cursers are required, thereby giving rise to a pure product. The main disadvantage lies in the difficulty with controlling the size of the nanoparticles. This study aims to clarify the influence of the microstructure of a thin film on its optical properties and also to establish the size relationship between the film grain and the nanoparticles generated during laser ablation. A comprehensive sample set of Gold (Au) films with different grain sizes was achieved using different deposition rates, temperatures, film thicknesses (<100nm) and substrates: Silica, Quartz and Sapphire. The microstructure of each film was analyzed using Atomic Force Microscopy (AFM). Single femtosecond laser pulses, above the ablation threshold flu-ence of each film, were applied to generate nanoparticles. Scanning Electron Microscopy (SEM) was used to image the re-deposited nanoparticles, from which the nanoparticle size distribution was established. Results confirm that the film microstructure is directly linked to the nanoparticles generated during laser ablation.
机译:薄膜产品的数量激增,促使人们对其制造和应用的各个方面进行研究。工业上关注的另一来源是激光烧蚀薄膜以产生纳米颗粒。由于不需要化学前体,因此该技术相对于其他制造方法具有优势,从而产生了纯净的产品。主要缺点在于难以控制纳米颗粒的尺寸。这项研究旨在阐明薄膜的微观结构对其光学性能的影响,并建立薄膜晶粒与激光烧蚀过程中产生的纳米粒子之间的尺寸关系。使用不同的沉积速率,温度,膜厚度(<100nm)和衬底(二氧化硅,石英和蓝宝石),可以获得具有不同晶粒尺寸的金(Au)膜的综合样本集。使用原子力显微镜(AFM)分析每个薄膜的微观结构。飞秒激光脉冲,高于每个薄膜的烧蚀阈值通量,被施加以生成纳米粒子。使用扫描电子显微镜(SEM)对重新沉积的纳米颗粒进行成像,从而确定纳米颗粒的大小分布。结果证实,膜的微观结构直接与激光烧蚀过程中产生的纳米颗粒有关。

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