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Characterization of direct- and back-scribing laser patterning of SnO_2: F for a-Si:H PV module fabrication

机译:用于a-Si:H PV模块制造的SnO_2:F的正向和反向刻划激光图案化的特性

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摘要

In thin film photovoltaic modules, the different solar cells are interconnected monolithically during the production process, which gives a greater control over the size and output characteristics of the finished module. The interconnection is typically achieved through different laser scribing processes made at different production steps. In thin film modules built in the superstrate configuration, the first laser process is the patterning of the transparent front electrode. This paper presents results on the investigation of this first laser scribing process on fluorine-doped tin oxide deposited onto a glass substrate using nanosecond diode-pumped solid-state laser sources. Processes made with two different wavelengths (1064 nm and 355 nm) and executed from the film-side and from the substrate side are compared and evaluated. The quality of the scribes is assessed with confocal and scanning electron microscopy images. In addition, Raman microscopy is used to study the extension of the heat affected zones. While good quality scribes were obtained using both wavelengths and either film-side or substrate-side irradiation, only using 355 nm and substrate-side scribing yielded grooves with no observable heat affected zones. It also needed the lowest values of energy per ablated volume and allowed for the highest processing speeds. As such, substrate side ablation with 355 nm is proposed as the best ablation strategy.
机译:在薄膜光伏模块中,不同的太阳能电池在生产过程中相互连接在一起,这可以更好地控制成品模块的尺寸和输出特性。通常通过在不同生产步骤进行的不同激光刻划工艺来实现互连。在以覆板构造构建的薄膜模块中,第一个激光工艺是对透明前电极进行构图。本文介绍了使用纳秒级二极管泵浦固态激光源对玻璃基板上沉积的氟掺杂氧化锡进行的第一个激光刻划过程的研究结果。比较并评估了从薄膜侧和基板侧执行的两种不同波长(1064 nm和355 nm)的工艺。使用共聚焦和扫描电子显微镜图像评估划线员的质量。另外,拉曼显微镜用于研究热影响区的扩展。虽然使用波长和膜侧或衬底侧照射均可获得高质量的划线,但仅使用355 nm和衬底侧划线即可产生没有可观察到的热影响区的凹槽。它还需要每烧蚀体积的最低能量值,并允许最高处理速度。因此,建议采用355 nm的基板侧烧蚀作为最佳烧蚀策略。

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  • 来源
    《Applied Surface Science》 |2013年第15期|223-227|共5页
  • 作者单位

    Divisidn de Energias Renovables, Energia Solar Fotovoltaica, CIEMAT, Avda. Complutense, 22,28040, Madrid, Spain;

    Divisidn de Energias Renovables, Energia Solar Fotovoltaica, CIEMAT, Avda. Complutense, 22,28040, Madrid, Spain;

    Centra Laser, Universidad Politecnica de Madrid, Ctra. de Valencia Km, 7.3,28031, Madrid, Spain;

    Divisidn de Energias Renovables, Energia Solar Fotovoltaica, CIEMAT, Avda. Complutense, 22,28040, Madrid, Spain;

    Centra Laser, Universidad Politecnica de Madrid, Ctra. de Valencia Km, 7.3,28031, Madrid, Spain;

    Divisidn de Energias Renovables, Energia Solar Fotovoltaica, CIEMAT, Avda. Complutense, 22,28040, Madrid, Spain;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    user processing; transparent conductive oxide; fluorine-doped tin oxide;

    机译:用户处理;透明导电氧化物;氟掺杂氧化锡;

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