Fs-laser processing of medical grade polydimethylsiloxane (PDMS)

摘要

Medical grade polydimethylsiloxane (PDMS) elastomer is a biomaterial widely used in medicine and high-tech devices, e.g. MEMS and NEMS. In this work, we report an experimental investigation on femtosecond laser processing of PDMS-elastomer with near infrared (NIR), visible (VIS) and ultraviolet (UV) pulses. High definition trenches are produced by varying processing parameters as laser wavelength, pulse duration, fluence, scanning speed and overlap of the subsequent pulses. The sample surface morphology and chemical composition are investigated by Laser Microscopy, SEM and Raman spectroscopy, addressing the effects of the various processing parameters through comparison with the native materials characteristics. For all the laser pulse wavelengths used, the produced tracks are successfully metalized with Ni via electro-less plating method. We observe a negligible influence of the time interval elapsed between laser treatment and metallization process. Our experimental findings suggest promising perspectives of femtosecond laser pulses in micro- and nano-fabrication of hi-tech PDMS devices. (C) 2015 Elsevier B.V. All rights reserved.