Step-height standards based on the rapid formation of monolayer steps on the surface of layered crystals

摘要

Metrology is essential for nanotechnology, especially for structures and devices with feature sizes going down to nm. Scanning probe microscopes (SPMs) permits measurement of nanometer- and subnanometer-scale objects. Accuracy of size measurements performed using SPMs is largely defined by the accuracy of used calibration measures. In the present publication, we demonstrate that height standards of monolayer step (similar to 1 and similar to 0.6 nm) can be easily prepared by cleaving Bi2Se3 and ZnWO4 layered single crystals. It was shown that the conducting surface of Bi2Se3 crystals offers height standard appropriate for calibrating STMs and for testing conductive SPM probes. Our AFM study of the morphology of freshly cleaved (0001) Bi2Se3 surfaces proved that such surfaces remained atomically smooth during a period of at least half a year. The (010) surfaces of ZnWO4 crystals remained atomically smooth during one day, but already two days later an additional nanorelief of amplitude similar to 0.3 nm appeared on those surfaces. This relief, however, did not further grow in height, and it did not hamper the calibration. Simplicity and the possibility of rapid fabrication of the step-height standards, as well as their high stability, make these standards available for a great, permanently growing number of users involved in 3D printing activities. (C) 2017 Elsevier B.V. All rights reserved.