Fabrication of high quality, deep-submicron Nb/Aio/sub kappa/Nb Josephson Junctions using chemical mechanical polishing

Bao Z.; Bhushan M.

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Fabrication of high quality, deep-submicron Nb/Aio/sub kappa/Nb Josephson Junctions using chemical mechanical polishing

机译：使用化学机械抛光制造高质量的深亚微米Nb / Aio / sub kappa / Nb Josephson结

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《IEEE Transactions on Applied Superconductivity》 |1995年第1995期|共页
作者
Bao Z.; Bhushan M.;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类超导体、超导体材料;半导体技术;
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1. Fabrication of high quality, deep-submicron Nb/AlO/sub x//Nb Josephson junctions using chemical mechanical polishing [J] . Bao Z., Bhushan M. IEEE Transactions on Applied Superconductivity . 1995,第2期

机译：使用化学机械抛光制造高质量的深亚微米Nb / AlO / sub x // Nb Josephson结
2. Fabrication of high quality, deep-submicron Nb/AlOx/Nb Josephson junctions using chemical mechanical polishing [J] . Bao Z., Bhushan M., Siyuan Ran, IEEE Transactions on Applied Superconductivity . 1995,第2期

机译：使用化学机械抛光制造高质量的深亚微米Nb / AlOx / Nb Josephson结
3. Fabrication of high quality Nb/AlO/sub x/-Al/Nb Josephson junctions. I. Sputtered Nb films for junction electrodes [J] . Imamura T., Shiota T. IEEE Transactions on Applied Superconductivity . 1992,第1期

机译：高质量Nb / AlO / sub x / -Al / Nb Josephson结的制造。 I.结电极溅射Nb膜
4. Fabrication and characterization of Nb/NbxSi1#x2212;x/Nb Josephson junction arrays for voltage standard [C] . Cao Wenhui, Li Jinjin, Zhong Yuan, Conference on Precision Electromagnetic Measurements . 2014

机译：用于电压标准的Nb / Nb x Si 1-x / Nb Josephson结阵列的制备和表征
5. Thermochemical analysis of magnesium diboride thin film synthesis and its application to Josephson junction fabrication. [D] . Kim, Jihoon. 2005

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7. Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al-AlOx/Nb Josephson Junctions for VLSI Circuits [O] . Tolpygo, Sergey K., Bolkhovsky, Vladimir, Weir, Terence J., 2014

机译：全平面深亚微米的制备工艺及性能用于VLsI电路的Nb / al-alOx / Nb Josephson结

Fabrication of high quality, deep-submicron Nb/Aio/sub kappa/Nb Josephson Junctions using chemical mechanical polishing

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