Fabrication of large area superconducting thin film by pulsed laserscanning

摘要

In order to deposit high quality high temperature superconducting (HTS) YBCO thin films with a large area, the pulsed laser scanning (PLS) method was tried and the thickness distribution of the film was investigated. Large area YBa2Cu3O7-x thin films on φ 36 mm diameter LaAlO3 and φ 42 mm diameter Y-ZrO2 (YSZ) single crystal substrates were obtained by rotating lenses with radii of 9 and 12.9 mm. The critical temperatures Tc of the films at the center and edge were all 90 K. The critical current density Jc at 77 K and zero magnetic field is over 106 A/cm2. X-ray diffraction showed that the thin films are completely c-axis oriented. The V-I characteristics of the thin films were also investigated