Cathodoluminescene Studies on Copper Implanted CdTe Crystals using Scanning Electron Microscope

摘要

Cathodoluminesence of single crystal CdTe implanted with 50 KeV copper ions has been studied by scanning electron microscope. High resolution scanning electron microscope cathodoluminescence spectral analysis of the picture revealed the inhomogeneous distribution of Cu impurities into the crystal. Some black dots in cu implanted CdTe have been related to Cu complexes due to supersaturation of Cu ions of doses 1×10~15-2×10~15 cm~2 into CdTe crystal. It was observed that the cathodoluminescence intensity is much increased in copper implanted sample than reference sample.