STANDARD SAMPLE FOR CALIBRATING OBSERVATION CONTRAST IN SCANNING ELECTRON MICROSCOPE, AND METHOD OF INSPECTING CRYSTALLINE SUBSTRATE USING SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a standard sample for objectively evaluating the quality of a scanning electron microscope.SOLUTION: A standard sample 41 has a step/terrace structure composed of single crystal SiC formed thereon, and the surface of each of the terraces is either one of a first lamination alignment or a second lamination alignment. When an angle formed by an electron beam radiated from a scanning electron microscope relative to the perpendicular line on the surface of the terrace is defined as an incident electron angle, in the standard sample 41, the contrast, which is the difference in light and shade between a video of the terrace of the first lamination alignment immediately below the surface and a video of the terrace of the second lamination alignment immediately below the surface, changes according to the incident electron angle.