Molecular Dynamics Study Of Groove Fabrication Process Using Afm-based Nanometric Cutting Technique

摘要

Three-dimensional molecular dynamics simulation of groove fabrication using atomic force microscopy (AFM)-based nanometric cutting technique is set up, fabrication processes of grooves with two types (line, and folder line) and five folder angles (0°, 30°, 45°, 60°, 90°) are simulated to investigate the effect of groove geometry on the fabrication process. The results show that the Normal force, Lateral force, and Resultant forces are almost symmetric with respect to the critical folder angle of 45°. The best surface quality of fabricated groove can be obtained at the folder angle of 45°. It reveals that the groove geometry has a significant effect on the groove fabrication process due to the material anisotropy on the atomic scale.