Microelectromechanical systems based Stewart platform with sub-nano resolution

摘要

There have been difficulties in the fabrication of microelectromechanical systems (MEMS) based Stewart platforms [D. Stewart, Proc. Inst. Mech. Eng. 180(15), 371 (1965)]. The macroscale positioning technology, such as universal joints, ball and roller bearings, and commercial actuators, used for building the macro Stewart platforms could not be fit into MEMS version machines. In this paper, we report that these difficulties were overcome at the National Institute of Standards and Technology (NIST). A prototype of NIST’s MEMS-based Stewart platform showed six degree-of-freedom kinematic capability with sub-nano-scale resolution. This MEMS Stewart platform can be adopted as a precision stage for sub nano-scale applications, such as the atomic force microscope and manipulation of molecules.