O-vacancy as the origin of negative bias illumination stress instability in amorphous In–Ga–Zn–O thin film transistors

摘要

We find that O-vacancy (VO) acts as a hole trap and plays a role in negative bias illumination stress instability in amorphous In–Ga–Zn–O thin film transistors. Photoexcited holes drift toward the channel/dielectric interface due to small potential barriers and can be captured by VO in the dielectrics. While some of VO+2 defects are very stable at room temperature, their original deep states are recovered via electron capture upon annealing. We also find that VO+2 can diffuse in amorphous phase, inducing hole accumulation near the interface under negative gate bias.