Fabrication of a microelectromechanical directional sound sensor with electronic readout using comb fingers

摘要

By emulating the hearing organ of the Ormia ochracea fly, a microelectromechanical sound sensornwas fabricated which is able to determine the direction of incident sound despite an overall sizenmuch smaller than the wavelength of interest. The sensor consists of two wings that are coupled innthe middle and attached to the surrounding substrate by two legs. The design incorporatedninterdigitated comb fingers on the wings and the substrate which enables electrostatic u0001capacitiveu0002nreadout. Measured electrical response showed a strong dependence on the direction of incidentnsound.