Study on shallow donor-type impurities of GaN epilayer regrown by epitaxial lateral overgrowth technique

摘要

p-doped gallium nitride (GaN) regrowth by epitaxial lateral overgrowth using a SiO_2 mask is studied. A comparison between SiO_2 and Al_2O_3 masked p-GaN by cathodoluminescence spectroscopy and scanning electron microscopy indicates that donor-type impurities are related to the SiO_2 mask. A domain peak of 3.25 eV induced by shallow-donor and acceptor transitions and the dark contrast of obtuse triangles have been detected in SiO_2 masked p-type GaN. Secondary ion mass spectroscopy is simultaneously employed for the analysis of SiO_2 and Al_2O_3 masked p-GaN and identifies that the source of donor-type impurities is from Si atoms. Furthermore, the experimental results of cross-sectional microstructures at different regrowth times have been investigated. It is found that the donor-type impurities tend to cluster in semi-polar (1122) facets before the coalescence at the bottom of adjacent triangular stripes starts. The explanation for the non-uniform distribution of impurities is that semi-polar (1122) facets exhibit more dangling bond densities than the (0001) plane, and the SiO_2 mask exposed to the vapor phase would likely introduce more impurities before the coalescence of GaN stripes.