A bright ion source based on the solid electrolyte (AgI)_(0.5)(AgPO_3)_(0.5) has been developed. The solid electrolyte source provides stable currents of Ag~+ in the microampere regime that make it suitable for focused ion beam applications. Similar conditions are expected for different solid electrolyte materials and their corresponding ions. This opens a broad field of applications in structuring and modifying devices on a nanometer scale using focused ion beams.
展开▼
