Orientation dependence of dielectric and ferroelectric properties of Pb(Zr_(0.8)Ti_(0.2))O_3/Pb(Zr_(0.2)Ti_(0.8))O_3 multilayered thin films

摘要

The Pb(Zr_(1-x)Ti_x)O_3 multilayered films consisting of Pb(Zr_(0.8)Ti_(0.2))O_3 and Pb(Zr_(0.2)Ti_(0.8))O_3 layers with different orientations were deposited by radio frequency magnetron sputtering with PbO_x and LaNiO_3 (LNO) buffer layers. The PbO_x and LNO buffer layers lead to the (001)/(100) and (101)/(110) orientations of the multilayered films, respectively. The orientation dependence of electrical properties of the multilayered films was investigated. Enhanced remnant polarization (2P_r=79.3 μC/cm~2) and dielectric constant (ε_r=857) were obtained for the multilayered films with (001)/(100) orientation as compared to those of the multilayered films with other orientations. These results reveal that the orientation control is important in obtaining good electrical properties.