Enhancement of optical absorption and photocurrent of 6H-SiC by laser surface nanostructuring

摘要

Nanoscale ripple structures with spatial periods of up to 155 nm are generated by a single beam ultrashort pulsed laser structuring of 6H-SiC surface. The period of nanoripples does not depend on the laser fluence and the number of pulses. Optical absorption and photocurrent measurements on SiC samples are investigated before and after laser nanostructuring. Nearly 40% enhancement of optical absorption and a factor of 3 increase of photocurrent are achieved after laser nanostructuring.