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Kinetically controlled, adhesiveless transfer printing using microstructured stamps

机译:通过微结构邮票进行动力学控制的无胶转移印刷

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摘要

This letter describes the physics and application of an approach to transfer printing that uses stamps with microstructures of relief embossed into their surfaces. Experimental measurement of velocity-dependent adhesive strength as a function of relief geometry reveals key scaling properties and provides a means for comparison to theoretical expectation. Formation of transistor devices that use nanoribbons of silicon transfer printed directly onto glass substrates without adhesive layers demonstrates the use of this type of approach for a high-performance (mobilities >325 cm~2/V s and on/off ratios >10~5) single crystal silicon on glass technology.
机译:这封信描述了一种转移印刷方法的物理原理和应用,这种方法使用的压模的表面印有浮雕的微结构。随速度变化的粘合强度随浮雕几何形状变化的实验测量揭示了关键的结垢特性,并提供了与理论预期进行比较的手段。使用直接转移到玻璃基板上而没有粘合剂层的硅纳米带转移晶体管器件的形成,证明了这种方法在高性能(迁移率> 325 cm〜2 / V s和开/关比> 10〜5)下的使用)玻璃上的单晶硅技术。

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  • 来源
    《Applied Physicsletters》 |2009年第11期|235-237|共3页
  • 作者单位

    Department of Materials Science and Engineering, Beckman Institute, and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Illinois 61801, USA;

    Department of Materials Science and Engineering, Beckman Institute, and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Illinois 61801, USA;

    School of Advanced Materials Science and Engineering, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Suwon 440-746, Republic of Korea;

    Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Illinois 61801, USA;

    Department of Mechanical Engineering, Northwestern University, Evanston, Illinois 60208, USA;

    Department of Mechanical Engineering, Northwestern University, Evanston, Illinois 60208, USA Department of Civil and Environmental Engineering, Northwestern University, Evanston, Illinois 60208, USA;

    Department of Materials Science and Engineering, Beckman Institute, and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Illinois 61801, USA Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Illinois 61801, USA Department of Chemistry, University of Illinois at Urbana-Champaign, Illinois 61801, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

  • 入库时间 2022-08-18 03:19:31

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