In situ small-angle x-ray scattering study of nanostructure evolution during decomposition of arc evaporated TiAlN coatings

摘要

Small-angle x-ray scattering was used to study in situ decomposition of an arc evaporated TiAlN coating into cubic-TiN and cubic-AlN particles at elevated temperature. At the early stages of decomposition particles with ellipsoidal shape form, which grow and change shape to spherical particles at higher temperatures. The spherical particles grow at a rate of 0.18 A/℃ while coalescing.